On-Site Generation of Electronics Gases

Low-cost, Reliable Generation of N2, H2 and Fluorine, Plus NH3

Regardless of your volume and purity needs, we have a wide selection of on-site gas generators supporting the full range of process needs in the global electronics industry
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Low Running Costs and Reliable Design

Our on-site gas generators are optimized to keep your total cost of ownership as low as possible. We look at all cost factors including capital outlay, power consumption and running costs. In addition, our on-site gas generators give you the benefit of uninterrupted operations. They are designed for continuous delivery, seven days a week, 24 hours a day.

Our experts will advise you on the best low-cost and reliable solution for:

  • Nitrogen generation
  • Hydrogen generation
  • Fluorine generation
  • Ammonia purification
On-Site Generator Capacities

Gas  

 Output range  

 Purity 
Nitrogen    6,000 - 50,000 Nm3 per hour   <1 ppb 
 Hydrogen   50 - 1,000 Nm3 per hour   99.999% 
 Fluorine   80 - 3,200 liters per hour   99.9% 
 Ammonia   1,000 - 5,000 liters per minute   99.99999% 

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SPECTRA N On-Site Nitrogen Generators

Generate ultra-high-purity nitrogen on site with a SPECTRA® N on-site N2 plant tailored to your needs

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HYDROPRIME On-Site Hydrogen Generators

Standardized, modularized HYDROPRIME® designs for fast, easy deployment of H2 generation on site

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GENERATION F On-Site Fluorine Generators

GENERATION F® is a safe, reliable way to bring the benefits of a steady supply of fluorine to your electronics site

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On-Site Ammonia Purification

Discover how you can purify NH3 on site to directly supply your ultra-high-purity electronics applications

Any questions?

One of our experts would be delighted to discuss your on-site needs, answer your questions and provide more detailed information
Contact us